A C-shaped hinge for displacement magnification in MEMS rotational structures.

ABSTRACT: The design, analysis, fabrication, and characterization of two distinct MEMS rotational structures are provided; these structures include a classical symmetrical lancet structure and a novel symmetrical C-shaped structure provided with a tilted arm, and both are actuated by thermal actuators. Our proposed C-shaped structure implemented a curved beam mechanism to enhance the movement delivered by the thermal actuators. The geometrical parameters of our proposed device were optimized using the design of experiment (DOE) method. Furthermore, the analytical modeling based on Castigliano's second theorem and the simulations based on the finite element method (FEM) were used to predict the behavior of the symmetrical C-shaped structure; the results were in good agreement with each other. The MEM

SUBMITTER: Kommanaboina NM 

PROVIDER: S-EPMC10764799 | biostudies-literature | 2024

REPOSITORIES: biostudies-literature