High-precision two-dimensional displacement metrology based on matrix metasurface.

ABSTRACT: A long-range, high-precision, and compact transverse displacement metrology is of crucial importance in both industries and scientific researches. However, it is a great challenge to measure arbitrary two-dimensional (2D) displacement with angstrom-level precision and hundred-micrometer range. Here, we demonstrated a prototype of high-precision 2D-displacement metrology with matrix metasurface. Light passing through the metasurface is diffracted into three beams in horizontal (H), vertical (V), and diagonal (D) linear polarization. 2D transverse displacement of the metasurface relative to the incident light beam is retrieved from the interferential optical powers arisen from coherent superposition between H-polarized and D-polarized beams or V-polarized and D-polarized beams. We experiment

SUBMITTER: Zang H 

PROVIDER: S-EPMC10780938 | biostudies-literature | 2024 Jan

REPOSITORIES: biostudies-literature