Synthesis and Characterization of Multilayered CrAlN/Al₂O₃ Tandem Coating Using HiPIMS for Solar Selective Applications at High Temperature.

ABSTRACT: The effect of applying a negative bias during deposition of a previously designed multilayer solar selective absorber coating was studied on two types of substrates (316L stainless steel and Inconel 625). The solar selective coating is composed of different chromium aluminum nitride layers deposited using a combination of radiofrequency (RF), direct current (DC), and high-power impulse magnetron sputtering (HiPIMS) technologies. The chemical composition is varied to generate an infrared reflective/absorber layer (with low Al addition and N vacancies) and two CrAlN intermediate layers with medium and high aluminum content (Al/Cr = 0.6 and 1.2). A top aluminum oxide layer (Al₂O₃) is deposited as an antireflective layer. In this work, a simultaneous DC-pulsed bias (-100

SUBMITTER: Sanchez-Perez M 

PROVIDER: S-EPMC10806925 | biostudies-literature | 2024 Jan

REPOSITORIES: biostudies-literature