Fast nanoscale imaging of strain in a multi-segment heterostructured nanowire with 2D Bragg ptychography.

ABSTRACT: Developing semiconductor devices requires a fast and reliable source of strain information with high spatial resolution and strain sensitivity. This work investigates the strain in an axially heterostructured 180 nm-diameter GaInP nanowire with InP segments of varying lengths down to 9 nm, simultaneously probing both materials. Scanning X-ray diffraction (XRD) is compared with Bragg projection ptychography (BPP), a fast single-projection method. BPP offers a sufficient spatial resolution to reveal fine details within the largest segments, unlike scanning XRD. The spatial resolution affects the quantitative accuracy of the strain maps, where BPP shows much-improved agreement with an elastic 3D finite element model compared with scanning XRD. The sensitivity of BPP to small deviations from t

SUBMITTER: Hammarberg S 

PROVIDER: S-EPMC10840305 | biostudies-literature | 2024 Feb

REPOSITORIES: biostudies-literature