Adjusting surface coverage of Pt nanocatalyst decoration for selectivity control in CMOS-integrated SnO₂ thin film gas sensors.

ABSTRACT: Smart gas-sensor devices are of crucial importance for emerging consumer electronics and Internet-of-Things (IoT) applications, in particular for indoor and outdoor air quality monitoring (e.g., CO₂ levels) or for detecting pollutants harmful for human health. Chemoresistive nanosensors based on metal-oxide semiconductors are among the most promising technologies due to their high sensitivity and suitability for scalable low-cost fabrication of miniaturised devices. However, poor selectivity between different target analytes restrains this technology from broader applicability. This is commonly addressed by chemical functionalisation of the sensor surface via catalytic nanoparticles. Yet, while the latter led to significant advances in gas selectivity, nanocatalyst

SUBMITTER: Sosada-Ludwikowska F 

PROVIDER: S-EPMC10863709 | biostudies-literature | 2024 Feb

REPOSITORIES: biostudies-literature