A Miniaturized Wireless Micropump Enabled by Confined Acoustic Streaming.

ABSTRACT: Miniaturization of health care, biomedical, and chemical systems is highly desirable for developing point-of-care testing (POCT) technologies. In system miniaturization, micropumps represent one of the major bottlenecks due to their undesirable pumping performance at such small sizes. Here, we developed a microelectromechanical system fabricated acoustic micropump based on an ultrahigh-frequency bulk acoustic wave resonator. The concept of an inner-boundary-confined acoustic jet was introduced to facilitate unidirectional flow. Benefitting from the high resonant frequency and confined acoustic streaming, the micropump reaches 32.620 kPa/cm³ (pressure/size) and 11.800 ml/min∙cm³ (flow rate/size), showing a 2-order-of-magnitude improvement in the energy transduction eff

SUBMITTER: You R 

PROVIDER: S-EPMC10895488 | biostudies-literature | 2024

REPOSITORIES: biostudies-literature