Nanocavity-Mediated Purcell Enhancement of Er in TiO₂ Thin Films Grown via Atomic Layer Deposition.

ABSTRACT: The use of trivalent erbium (Er³⁺), typically embedded as an atomic defect in the solid-state, has widespread adoption as a dopant in telecommunication devices and shows promise as a spin-based quantum memory for quantum communication. In particular, its natural telecom C-band optical transition and spin-photon interface make it an ideal candidate for integration into existing optical fiber networks without the need for quantum frequency conversion. However, successful scaling requires a host material with few intrinsic nuclear spins, compatibility with semiconductor foundry processes, and straightforward integration with silicon photonics. Here, we present Er-doped titanium dioxide (TiO₂) thin film growth on silicon substrates using a foundry-scalable atomic layer de

SUBMITTER: Ji C 

PROVIDER: S-EPMC11008365 | biostudies-literature | 2024 Apr

REPOSITORIES: biostudies-literature