Zirconium Oxynitride Thin Films for Photoelectrochemical Water Splitting.

ABSTRACT: Transition metal oxynitrides are a promising class of functional materials for photoelectrochemical (PEC) applications. Although these compounds are most commonly synthesized via ammonolysis of oxide precursors, such synthetic routes often lead to poorly controlled oxygen-to-nitrogen anion ratios, and the harsh nitridation conditions are incompatible with many substrates, including transparent conductive oxides. Here, we report direct reactive sputter deposition of a family of zirconium oxynitride thin films and the comprehensive characterization of their tunable structural, optical, and functional PEC properties. Systematic increases of the oxygen content in the reactive sputter gas mixture enable access to different crystalline structures within the zirconium oxynitride family. Increasin

SUBMITTER: Streibel V 

PROVIDER: S-EPMC11094725 | biostudies-literature | 2024 May

REPOSITORIES: biostudies-literature