Crystal Structure Modification and Dielectric Properties of Sr- and La-Containing A₂B₂O₇ Thin Films for High-Temperature Operational Film Capacitors.

ABSTRACT: In order to obtain thermally stable thin-film materials with high dielectric constant, A₂B₂O₇ thin films (Sr₂Ta₂O₇, Sr₂Nb₂O₇, La₂Zr₂O₇, and La₂Ti₂O₇) containing Sr or La and their solid solutions were grown on Pt/Ti/SiO₂/Si substrates by RF sputtering and their crystal structures and dielectric properties were investigated. The Sr₂Ta₂O₇ and La₂Ti₂O₇ films exhibit highly oriented crystal structures. By contrast, the Sr₂Nb₂O₇ and La₂Zr₂O₇ films exhibit polycrystalline structures. The leaka

SUBMITTER: Nagata T 

PROVIDER: S-EPMC11190920 | biostudies-literature | 2024 Jun

REPOSITORIES: biostudies-literature