Visualization system to identify structurally vulnerable links in OHT railway network in semiconductor FAB using betweenness centrality.

ABSTRACT: In semiconductor fabrication (FAB), wafers are placed into carriers known as Front Opening Unified Pods (FOUPs), transported by the Overhead Hoist Transport (OHT). The OHT, a type of Automated Guided Vehicle (AGV), moves along a fixed railway network in the FAB. The routes of OHTs on the railway network are typically determined by a Single Source Shortest Path (SSSP) algorithm such as Dijkstra's. However, the presence of hundreds of operating OHTs often leads to path interruptions, causing congestion or deadlocks that ultimately diminish the overall productivity of the FAB. This research focused on identifying structurally vulnerable links within the OHT railway network in semiconductor FAB and developing a visualization system for enhanced on-site decision-making. We employed betweenness

SUBMITTER: Choi J 

PROVIDER: S-EPMC11244790 | biostudies-literature | 2024

REPOSITORIES: biostudies-literature