Thermoelectric characterization of crystalline nano-patterned silicon membranes.

ABSTRACT: Research towards efficient and environmentally friendly thermoelectrics proposes silicon nanostructures as possible candidates through reduction of the phononic thermal conductivity. However, there is scarce literature about experimental measurements of the thermoelectric figure-of-merit zT on actual crystalline silicon devices. This article reports on the fabrication and full thermoelectric characterization of crystalline 60 nm thick membranes. To that end, an experiment with four types of built-in devices was designed using a silicon-on-insulator substrate to extract the Seebeck coefficient, electrical conductivity and thermal conductivity. The results show indeed a reduced thermal conductivity of 31 W m^-1 K^-1 for a 60 nm thick Si membrane and κ = 18 W

SUBMITTER: Ikzibane H 

PROVIDER: S-EPMC11247555 | biostudies-literature | 2024 Jul

REPOSITORIES: biostudies-literature