Assessment of wafer scale MoS₂ atomic layers grown by metal-organic chemical vapor deposition using organo-metal, organo-sulfide, and H₂S precursors.

ABSTRACT: Transition Metal Dichalcogenides (TMDs) are a unique class of materials that exhibit attractive electrical and optical properties which have generated significant interest for applications in microelectronics, optoelectronics, energy storage, and sensing. Considering the potential of these materials to impact such applications, it is crucial to develop a reliable and scalable synthesis process that is compatible with modern industrial manufacturing methods. Metal-organic chemical vapor deposition (MOCVD) offers an ideal solution to produce TMDs, due to its compatibility with large-scale production, precise layer control, and high material purity. Optimization of MOCVD protocols is necessary for effective TMD synthesis and integration into mainstream technologies. Additionally, improvements

SUBMITTER: Curtis M 

PROVIDER: S-EPMC11255563 | biostudies-literature | 2024 Jul

REPOSITORIES: biostudies-literature