Bolometric IR photoresponse based on a 3D micro-nano integrated CNT architecture.

ABSTRACT: A new 3D micro-nano integrated M-shaped carbon nanotube (CNT) architecture was designed and fabricated. It is based on vertically aligned carbon nanotube arrays composed of low-density, mainly double-walled CNTs with simple lateral external contacts to the surroundings. Standard optical lithography techniques were used to locally tailor the width of the vertical block structure. The complete sensor system, based on a broadband blackbody absorber region and a high-resistance thermistor region, can be fabricated in a single chemical vapor deposition process step. The thermistor resistance is mainly determined by the high junction resistances of the adjacent aligned CNTs. This configuration also provides low lateral thermal conductivity and a high temperature coefficient of resistance (TCR).

SUBMITTER: Al-Mafrachi Y 

PROVIDER: S-EPMC11331537 | biostudies-literature | 2024

REPOSITORIES: biostudies-literature