Amorphous Carbon Nitride Films: Surface and Subsurface Composition and Bonding.

ABSTRACT: To obtain quantitative information about the composition and bonding of atoms located at and beyond the analyzed solid surface nondestructively, we applied angle-resolved X-ray photoelectron spectroscopy aided by the maximum entropy method to air-exposed amorphous carbon nitride films deposited by pulsed laser deposition of diamond-like carbon modified by low-energy nitrogen ion bombardment during film growth. We demonstrate that the composition, chemical bonding, and mass density vary significantly from the top surface to a shallow subsurface region. The analyzed samples, in a shallow surface region of ∼1 nm, are composed of oxygen, nitrogen, hydrogen, and mostly carbon in sp² hybridization. In a deeper region, the C sp³ content increases substantially going to a max

SUBMITTER: Zemek J 

PROVIDER: S-EPMC11411727 | biostudies-literature | 2024 Sep

REPOSITORIES: biostudies-literature