Stable electrospray signal on a microfabricated glass chip with three-dimensional open edge and tiered depth geometries.

ABSTRACT: This paper presents the microfabrication and performance of a three-dimensional electrospray ionization (ESI) emitter tip made from glass, which achieves stable current signals important for chemical analysis. Our novel microfabrication process and custom-built signal conditioning hardware provides the advantage of providing accurate features and steady signals. The fabrication process relies on standard microfabrication techniques (i.e., deposition, photolithography, and wet etching). This fabrication method involves the novel application of two layers of positive and negative photoresists in addition to Parafilm^® wax tape. Open edge and tiered depth details were successfully created from a multilayer planar mask. This is a benefit for integrated miniaturized and microfluidic s

SUBMITTER: Schmidt AJ 

PROVIDER: S-EPMC11412618 | biostudies-literature | 2023 May

REPOSITORIES: biostudies-literature