Pros and Cons of (NH₄)₂S Solution Treatment of p-GaN/Metallization Interface: Perspectives for Laser Diode.

ABSTRACT: The impact of wet treatment using an (NH₄)₂S-alcohol solution on the interface state of the p-GaN/Ni/Au/Pt contact system and laser diode processing was investigated. Sulfur wet cleaning resulted in reduced surface roughness and contact resistivity. The lowest specific contact resistance (ρ_c < 1 × 10^-4 Ω·cm²) was achieved with samples treated with an (NH₄)₂S-isopropanol solution, whereas the highest resistivity (ρ_c = 3.3 × 10^-4 Ω·cm²) and surface roughness (R_a = 16 nm) were observed in samples prepared by standard methods. Annealing the contact system in an N₂ + O₂ + H₂O atmosphere caused degradation through species i

SUBMITTER: Levchenko I 

PROVIDER: S-EPMC11433334 | biostudies-literature | 2024 Sep

REPOSITORIES: biostudies-literature