Graphene-enabled laser lift-off for ultrathin displays.

ABSTRACT: Laser lift-off (LLO) of ultrathin polyimide (PI) films is important in the manufacturing of ultrathin displays. However, conventional LLO technologies face challenges in separating the ultrathin PI films without causing mechanical and electrical damage to integrated devices. Here, we propose a graphene-enabled laser lift-off (GLLO) method to address the challenges. The GLLO method is developed by integrating chemical vapor deposition (CVD)-grown graphene at the interface between a transparent carrier and an ultrathin PI film, exhibiting improved processability and lift-off quality. In particular, the GLLO method significantly mitigates plastic deformation of the PI film and minimizes carbonaceous residues remaining on the carrier. The role of graphene is attributed to three factors: enhanc

SUBMITTER: Kang S 

PROVIDER: S-EPMC11436630 | biostudies-literature | 2024 Sep

REPOSITORIES: biostudies-literature