Influence of carbon ionization increment by adding ne on the bonding, electrical, and tribological properties of carbon thin films deposited by HiPIMS.

ABSTRACT: In this work, we use mass quadrupole spectroscopy to analyze the ion energy distribution function for C⁺ ions from different gas composition discharges (20, 40, 60, 80, and 90% Ne) + Ar in a plasma sputtering process. Carbon films were obtained for each gas composition discharge. The carbon bonding structure of films was analyzed by Raman spectroscopy using deconvolution fitting of the G and D Raman peaks. The C-sp³ content was correlated with the electrical and tribological properties of the carbon films. Our results further corroborate the enhancement of carbon ionization in HiPIMS processes by adding neon in conventional argon gas during the deposition process. Furthermore, we found that excessive levels of carbon ionization were detrimental in the formation of C-s

SUBMITTER: Rivera Tello CD 

PROVIDER: S-EPMC11437214 | biostudies-literature | 2024 Sep

REPOSITORIES: biostudies-literature