Direct-bonded diamond membranes for heterogeneous quantum and electronic technologies.

ABSTRACT: Diamond has superlative material properties for a broad range of quantum and electronic technologies. However, heteroepitaxial growth of single crystal diamond remains limited, impeding integration and evolution of diamond-based technologies. Here, we directly bond single-crystal diamond membranes to a wide variety of materials including silicon, fused silica, sapphire, thermal oxide, and lithium niobate. Our bonding process combines customized membrane synthesis, transfer, and dry surface functionalization, allowing for minimal contamination while providing pathways for near unity yield and scalability. We generate bonded crystalline membranes with thickness as low as 10 nm, sub-nm interfacial regions, and nanometer-scale thickness variability over 200 by 200 μm² areas. We meas

SUBMITTER: Guo X 

PROVIDER: S-EPMC11467219 | biostudies-literature | 2024 Oct

REPOSITORIES: biostudies-literature