Dispersion-Controlled Gold-Aluminum-Silicon Dioxide-Aluminum Nanopawn Structures for Visible to NIR Light Modulation.

ABSTRACT: As an efficient patterning method for nanostructures, nanocolloidal lithography (NCL) presents a controllable and scalable means for achieving a uniform and good sidewall profile, and a high aspect ratio. While high selectivity between the etching mask and targeted materials is also essential for NCL-based precision nanophotonic structures, its realization in multi-material nanophotonic structures still remains a challenge due to the dielectric- or metallic-material-dependent etching selectivity. Here, dispersion-controlled Au-NCL is proposed, which enables high selectivity for Al and SiO₂ over a Au nanoparticle (Au-NP) mask. Utilizing the proposed process, wafer-scale, uniformly dispersed multi-material nanopawn structures (Au-NPs/Al-SiO₂ cylinders) on an Al ultrathi

SUBMITTER: Park J 

PROVIDER: S-EPMC11468642 | biostudies-literature | 2021 Apr

REPOSITORIES: biostudies-literature