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Understanding Electrical Conduction and Nanopore Formation During Controlled Breakdown.


ABSTRACT: Controlled breakdown has recently emerged as a highly appealing technique to fabricate solid-state nanopores for a wide range of biosensing applications. This technique relies on applying an electric field of approximately 0.4-1 V nm-1 across the membrane to induce a current, and eventually, breakdown of the dielectric. Although previous studies have performed controlled breakdown under a range of different conditions, the mechanism of conduction and breakdown has not been fully explored. Here, electrical conduction and nanopore formation in SiNx membranes during controlled breakdown is studied. It is demonstrated that for Si-rich SiNx , oxidation reactions that occur at the membrane-electrolyte interface limit conduction across the dielectric. However, for

SUBMITTER: Fried JP 

PROVIDER: S-EPMC11475566 | biostudies-literature | 2021 Sep

REPOSITORIES: biostudies-literature