Absolute Deflection Measurements in a Micro- and Nano-Electromechanical Fabry-Perot Interferometry System.

ABSTRACT: Fabry-Perot laser interferometry is a common laboratory technique used to interrogate resonant micro- and nano-electromechanical systems (MEMS/NEMS). This method uses the substrate beneath a vibrating MEMS/NEMS device as a static reference mirror, encoding relative device motion in the reflected laser power. In this work, we present a general approach for calibrating these optical systems based on measurements of large-amplitude motion that exceeds one half of the laser wavelength. Utilizing the intrinsic nonlinearity of the optical transduction, our method enables the direct measurement of the system's transfer function (motion-to-detected-voltage). We experimentally demonstrate the use of this technique to measure vibration amplitudes and changes in the equilibrium position of a MEMS/NEM

SUBMITTER: De Alba R 

PROVIDER: S-EPMC11494690 | biostudies-literature | 2019

REPOSITORIES: biostudies-literature