Generic characterization method for nano-gratings using deep-neural-network-assisted ellipsometry.

ABSTRACT: As a non-destructive and rapid technique, optical scatterometry has gained widespread use in the measurement of film thickness and optical constants. The recent advances in deep learning have presented new and powerful approaches to the resolution of inverse scattering problems. However, the application of deep-neural-network-assisted optical scatterometry for nanostructures still faces significant challenges, including poor stability, limited functionalities, and high equipment requirements. In this paper, a novel characterization method is proposed, which employs deep-neural-network-assisted ellipsometry to address these challenges. The method processes ellipsometric angles, which are measured by basic ellipsometers, as functional signals. A comprehensive model is developed to profile na

SUBMITTER: Jiang Z 

PROVIDER: S-EPMC11501600 | biostudies-literature | 2024 Mar

REPOSITORIES: biostudies-literature