Sensitivity enhancement of nonlinear micromechanical sensors using parametric symmetry breaking.

ABSTRACT: The working mechanism of resonant sensors is based on tracking the frequency shift in the linear vibration range. Contrary to the conventional paradigm, in this paper, we show that by tracking the dramatic frequency shift of the saddle-node bifurcation on the nonlinear parametric isolated branches in response to external forces, we can dramatically boost the sensitivity of MEMS force sensors. Specifically, we first theoretically and experimentally investigate the double hysteresis phenomena of a parametrically driven micromechanical resonator under the interaction of intrinsic nonlinearities and direct external drive. We demonstrate that the double hysteresis is caused by symmetry breaking in the phase states. The frequency response undergoes an additional amplitude jump from the symmetry-

SUBMITTER: Xu Y 

PROVIDER: S-EPMC11519502 | biostudies-literature | 2024 Oct

REPOSITORIES: biostudies-literature