Rapid-response, low-detection-limit, positive-negative air pressure sensing: GaN chips integrated with hydrophobic PDMS films.

ABSTRACT: Despite the importance of positive and negative pressure sensing in numerous domains, the availability of a single sensing unit adept at handling this dual task remains highly limited. This study introduces a compact optical device capable of swiftly and precisely detecting positive and negative pressures ranging from -35 kPa to 35 kPa. The GaN chip, which serves as a core component of the device, is monolithically integrated with light-emitting and light-detecting elements. By combining a deformable PDMS film coated with a hydrophobic layer, the chip can respond to changes in optical reflectance induced by pressure fluctuations. The integrated sensing device has low detection limits of 4.3 Pa and -7.8 Pa and fast response times of 0.14 s and 0.22 s for positive and negative pressure varia

SUBMITTER: Gui S 

PROVIDER: S-EPMC11527884 | biostudies-literature | 2024 Nov

REPOSITORIES: biostudies-literature