Single-crystalline High-κ GdOCl dielectric for two-dimensional field-effect transistors.

ABSTRACT: Two-dimensional (2D) dielectrics, integrated with high-mobility semiconductors, show great promise to overcome the scaling limits in miniaturized integrated circuits. However, the 2D dielectrics explored to date still face the challenges of low crystallinity, diminished dielectric constant, and the lack of effective synthesis methods. Here, we report the controllable synthesis of ultra-thin gadolinium oxychloride (GdOCl) nanosheets via a chloride hydrate-assisted chemical vapor deposition (CVD) method. The resultant GdOCl nanosheets display good dielectric properties, including a high dielectric constant (high-κ) of 15.3, robust breakdown field strengths (E_bd) exceeding 9.9 MV/cm, and minimal gate leakage currents of approximately 10^-6 A/cm². The top-gated

SUBMITTER: Xu W 

PROVIDER: S-EPMC11531513 | biostudies-literature | 2024 Nov

REPOSITORIES: biostudies-literature