In Situ Multiphysical Metrology for Photonic Wire Bonding by Two-Photon Polymerization.

ABSTRACT: Femtosecond laser two-photon polymerization (TPP) technology, known for its high precision and its ability to fabricate arbitrary 3D structures, has been widely applied in the production of various micro/nano optical devices, achieving significant advancements, particularly in the field of photonic wire bonding (PWB) for optical interconnects. Currently, research on optimizing both the optical loss and production reliability of polymeric photonic wires is still in its early stages. One of the key challenges is that inadequate metrology methods cannot meet the demand for multiphysical measurements in practical scenarios. This study utilizes novel in situ scanning electron microscopy (SEM) to monitor the working PWBs fabricated by TPP technology at the microscale. Optical and mechanical meas

SUBMITTER: Lei Y 

PROVIDER: S-EPMC11547578 | biostudies-literature | 2024 Oct

REPOSITORIES: biostudies-literature