Optimization of Thermoelectric Performance of Ag₂Te Films via a Co-Sputtering Method.

ABSTRACT: Providing self-powered energy for wearable electronic devices is currently an important research direction in the field of thermoelectric (TE) thin films. In this study, a simple dual-source magnetron sputtering method was used to prepare Ag₂Te thin films, which exhibit good TE properties at room temperature, and the growth temperature and subsequent annealing process were optimized to obtain high-quality films. The experimental results show that films grown at a substrate temperature of 280 °C exhibit a high power factor (PF) of ~3.95 μW/cm·K² at room temperature, which is further improved to 4.79 μW/cm·K² after optimal annealing treatment, and a highest PF of ~7.85 μW/cm·K² was observed at 200 °C. Appropriate annealing temperature effectively i

SUBMITTER: Xu H 

PROVIDER: S-EPMC11547814 | biostudies-literature | 2024 Nov

REPOSITORIES: biostudies-literature