Enhancement of the Sensing Performance of Devices based on Multistimuli-Responsive Hybrid Materials.

ABSTRACT: Capturing environmental stimuli is an essential aspect of electronic skin applications in robotics and prosthetics. Sensors made of temperature- and humidity-responsive hydrogel and piezoelectric zinc oxide (ZnO) core-shell nanorods have shown the necessary sensitivity. This is achieved by using highly conformal and substrate independent deposition methods for the ZnO and the hydrogel, i.e., plasma enhanced atomic layer deposition (PEALD) and initiated chemical vapor deposition (iCVD). In this work, we demonstrate that the use of a multichamber reactor enables performing PEALD and iCVD, sequentially, without breaking the vacuum. The sequential deposition of uniform as well as conformal thin films responsive to force, temperature, and humidity improved the deposition time and quality signif

SUBMITTER: Abu Ali T 

PROVIDER: S-EPMC11565566 | biostudies-literature | 2024 Nov

REPOSITORIES: biostudies-literature