Chip-scale sensor for spectroscopic metrology.

ABSTRACT: Miniaturized spectrometers hold great promise for in situ, in vitro, and even in vivo sensing applications. However, their size reduction imposes vital performance constraints in meeting the rigorous demands of spectroscopy, including fine resolution, high accuracy, and ultra-wide observation window. The prevailing view in the community holds that miniaturized spectrometers are most suitable for coarse identification of signature peaks. Here, we present an integrated reconstructive spectrometer that enables near-infrared (NIR) spectroscopic metrology, and demonstrate a fully packaged sensor with auxiliary electronics. Such a sensor operates over a 520 nm bandwidth together with a resolution below 8 pm, yielding a record-breaking bandwidth-to-resolution ratio of over 65,000. The classificat

SUBMITTER: Yao C 

PROVIDER: S-EPMC11603224 | biostudies-literature | 2024 Nov

REPOSITORIES: biostudies-literature