A microgripper based on electrothermal Al-SiO₂ bimorphs.

ABSTRACT: Microgrippers are essential for assembly and manipulation at the micro- and nano-scales, facilitating important applications in microelectronics, MEMS, and biomedical engineering. To guarantee the safe handling of delicate materials and micro-objects, a microgripper needs to be designed to operate with exceptional precision, rapid response, user-friendly operation, strong reliability, and low power consumption. In this study, we develop an electrothermal actuated microgripper with Al-SiO₂ bimorphs as the primary structural element. The fabricated microgripper naturally adopts a closed state due to process-induced residual stresses. The thermal expansion mismatch between Al and SiO₂ allows for an easy transition of the microgripper between open and closed states by tem

SUBMITTER: Yang H 

PROVIDER: S-EPMC11649916 | biostudies-literature | 2024 Dec

REPOSITORIES: biostudies-literature