Thermogravimetric analysis of commercial tungsten molecular precursors for vapor phase deposition processes.

ABSTRACT: Thin films and coatings based on Group 6 metal tungsten (W) have garnered intense interest for applications including catalysis, lubrication, and solar energy. Due to its selectivity and conformality, atomic layer deposition (ALD) has emerged as a key route towards oxides, dichalcogenides, and elemental metal films of W. A key component of the ALD process is the appropriate selection of molecular precursors. Thermogravimetric analysis (TGA) is the primary sorting criterion for precursor suitability and helps delineate probable ALD temperature windows, sublimation/vaporization kinetics, and parameters of decomposition. Currently, a majority of the W materials growth literature is traced to a grouping of commercially available volatile molecular precursors. However, no comprehensive thermoch

SUBMITTER: Currie TM 

PROVIDER: S-EPMC11656762 | biostudies-literature | 2024 Dec

REPOSITORIES: biostudies-literature