Synthesis and Characterization of Optically Transparent and Electrically Conductive Mo-Doped ZnO, F-Doped ZnO, and Mo/F-Codoped ZnO Thin Films via Aerosol-Assisted Chemical Vapor Deposition.

ABSTRACT: Mo-doped ZnO (MZO), F-doped ZnO (FZO), and Mo/F-codoped ZnO (MFZO) films have been deposited using a simple, cheap, and effective thin-film preparation route, aerosol-assisted chemical vapor deposition (AACVD). ZnO was successfully doped with Mo and/or F, confirmed by X-ray photoelectron spectroscopy (XPS) and by a decrease in unit cell parameters from X-ray diffraction (XRD). XRD also confirmed that all of the films had hexagonal wurtzite ZnO structures. Scanning electron microscopy showed that all of the films had well-defined surface features. The undoped ZnO film had a high resistivity of ∼10² Ω·cm, determined by Hall effect measurements, and a visible light transmittance of 72%, determined by ultraviolet-visible (UV-vis)-IR spectroscopy. The transmittance of the doped and c

SUBMITTER: Chen N 

PROVIDER: S-EPMC11660145 | biostudies-literature | 2024 Dec

REPOSITORIES: biostudies-literature