High sound pressure piezoelectric micromachined ultrasonic transducers using sputtered potassium sodium niobate.

ABSTRACT: This work presents air-coupled piezoelectric micromachined ultrasonic transducers (pMUTs) with high sound pressure level (SPL) under low-driving voltages by utilizing sputtered potassium sodium niobate K_0.34Na_0.66NbO₃ (KNN) films. A prototype single KNN pMUT has been tested to show a resonant frequency at 106.3 kHz under 4 V_p-p with outstanding characteristics: (1) a large vibration amplitude of 3.74 μm/V, and (2) a high acoustic root mean square (RMS) sound pressure level of 105.5 dB/V at 10 cm, which is 5-10 times higher than those of AlN-based pMUTs at a similar frequency. There are various potential sensing and actuating applications, such as fingerprint sensing, touch point, and gesture recognition. In this work, we present demonstrations in

SUBMITTER: Xia F 

PROVIDER: S-EPMC11671594 | biostudies-literature | 2024 Dec

REPOSITORIES: biostudies-literature