Finite element-based nonlinear dynamic optimization of nanomechanical resonators.

ABSTRACT: Nonlinear dynamic simulations of mechanical resonators have been facilitated by the advent of computational techniques that generate nonlinear reduced order models (ROMs) using the finite element (FE) method. However, designing devices with specific nonlinear characteristics remains inefficient since it requires manual adjustment of the design parameters and can result in suboptimal designs. Here, we integrate an FE-based nonlinear ROM technique with a derivative-free optimization algorithm to enable the design of nonlinear mechanical resonators. The resulting methodology is used to optimize the support design of high-stress nanomechanical Si₃N₄ string resonators, in the presence of conflicting objectives such as simultaneous enhancement of Q-factor and nonlinear Duff

SUBMITTER: Li Z 

PROVIDER: S-EPMC11746933 | biostudies-literature | 2025 Jan

REPOSITORIES: biostudies-literature