Using light to image millimeter wave based on stacked meta-MEMS chip.

ABSTRACT: A stacked metamaterial MEMS (meta-MEMS) chip is proposed, which can perfectly absorb electromagnetic waves, convert them into mechanical energy, drive movement of the optical micro-reflectors array, and detect millimeter waves. It is equivalent to using visible light to image a millimeter wave. The meta-MEMS adopts the design of upper and lower chip separation and then stacking to achieve the "dielectric-resonant-air-ground" structure, reduce the thickness of the metamaterial and MEMS structures, and improve the performance of millimeter wave imaging. For verification, we designed and prepared a 94 GHz meta-MEMS focal plane array chip, in which the sum of the thickness of the metamaterial and MEMS structures is only 1/2500 wavelength, the pixel size is less than 1/3 wavelength, but the abs

SUBMITTER: Wang H 

PROVIDER: S-EPMC11751477 | biostudies-literature | 2025 Jan

REPOSITORIES: biostudies-literature