Spatially Precise Light-Activated Dedoping in Wafer-Scale MoS₂ Films.

ABSTRACT: 2D materials, particularly transition metal dichalcogenides (TMDCs), have shown great potential for microelectronics and optoelectronics. However, a major challenge in commercializing these materials is the inability to control their doping at a wafer scale with high spatial fidelity. Interface chemistry is used with the underlying substrate oxide and concomitant exposure to visible light in ambient conditions for photo-dedoping wafer scale MoS₂. It is hypothesized that the oxide layer traps photoexcited holes, leaving behind long-lived electrons that become available for surface reactions with ambient air at sulfur vacancies (defect sites) resulting in dedoping. Additionally, high fidelity spatial control is showcased over the dedoping process, by laser writing, and fine contro

SUBMITTER: Ghoshal D 

PROVIDER: S-EPMC11756039 | biostudies-literature | 2025 Jan

REPOSITORIES: biostudies-literature