Nanophotonic inspection of deep-subwavelength integrated optoelectronic chips.

ABSTRACT: Artificial nanostructures with ultrafine and deep-subwavelength features have emerged as a paradigm-shifting platform to advanced light-field management, becoming key building blocks for high-performance integrated optoelectronics and flat optics. However, direct optical inspection of integrated chips remains a missing metrology gap that hinders quick feedback between design and fabrications. Here, we demonstrate that photothermal nonlinear scattering microscopy can be used for direct imaging and resolving of integrated optoelectronic chips beyond the diffraction limit. We reveal that the inherent coupling among deep-subwavelength nanostructures supporting leaky resonances allows for the pronounced heating effect to access reversible nonlinear modulations of the confocal reflection intensi

SUBMITTER: Che Y 

PROVIDER: S-EPMC11759039 | biostudies-literature | 2025 Jan

REPOSITORIES: biostudies-literature