MEMS Smart Glass with Larger Angular Tuning Range and 2D Actuation.

ABSTRACT: Millions of electrostatically actuatable micromirror arrays have been arranged in between windowpanes in inert gas environments, enabling active daylighting in buildings for illumination and climatization. MEMS smart windows can reduce energy consumption significantly. However, to allow personalized light steering for arbitrary user positions with high flexibility, two main limitations must be overcome: first, limited tuning angle spans by MEMS pull-in effects; and second, the lack of a second orthogonal tuning angle, which is highly required. Firstly, design improvements of electrostatically actuatable micromirror arrays are reported by utilizing tailored bottom electrode structures for enlarging the tilt angle (Φ). Considerably larger tuning ranges are presented, significantly improving

SUBMITTER: Hasan MK 

PROVIDER: S-EPMC11767687 | biostudies-literature | 2024 Dec

REPOSITORIES: biostudies-literature