A highly hydroxylated 6-tin oxide cluster serves as an efficient e-beam and EUV-photoresist to achieve high-resolution patterns.

ABSTRACT: A carboxylated-free cluster, formulated as (BuSn)₆O₄(OH)₁₀ (2) was synthesized from the reaction of (BuSn)₆O₄Cl₂(MeCO₂)₈ (1) with LiOH (aq.) in cold tetrahydrofuran (THF). This synthesis marks the first successful demonstration of complete decarboxylation of a metal carboxylate cluster using LiOH, resulting in the formation of a carboxylate-free metal oxide cluster. Comparative analysis of their ¹¹⁹Sn NMR, IR absorption spectra and ESI mass spectra suggests that cluster (2) possesses a ladder-type framework. Notably, cluster (2) exhibits superior surface smoothness and enhanced photosensitivity to both e-beams and EUV light compared to the well-known tin oxide cage, [(BuSn)₁₂O

SUBMITTER: Li CD 

PROVIDER: S-EPMC11800413 | biostudies-literature | 2025 Mar

REPOSITORIES: biostudies-literature