Pd-Decorated SnO₂ Nanofilm Integrated on Silicon Nanowires for Enhanced Hydrogen Sensing.

ABSTRACT: The development of reliable, highly sensitive hydrogen sensors is crucial for the safe implementation of hydrogen-based energy systems. This paper proposes a novel way to enhance the performance of hydrogen sensors through integrating Pd-SnO₂ nanofilms on the substrate with silicon nanowires (SiNWs). The samples were fabricated via a simple and cost-effective process, mainly consisting of metal-assisted chemical etching (MaCE) and electron beam evaporation. Structural and morphological characterizations were conducted using scanning electron microscopy (SEM) and X-ray photoelectron spectroscopy (XPS). The experimental results showed that, compared to those without SiNW structure or decorative Pd nanoparticles, the Pd-decorated SnO₂ nanofilm integrated on the SiNW subs

SUBMITTER: Fang T 

PROVIDER: S-EPMC11820637 | biostudies-literature | 2025 Jan

REPOSITORIES: biostudies-literature