Thermally Assisted Atomic-Scale Intermixing and Ordering in GeTe-Sb₂Te₃ Superlattices.

ABSTRACT: Interfacial phase change memory (iPCM) devices have been shown to switch with significantly reduced power consumption, compared with conventional phase-change memory devices. These iPCMs are based on a periodic structure of nanometer-sized layers of chalcogenides called a chalcogenide superlattice (CSL). Strong temperature increases have been observed within the CSL during the switching procedure, questioning the stability of the CSL structure. In this study, we conduct a detailed quantitative analysis to investigate the evolution of the structure and composition of the sputter-deposited GeTe-Sb₂Te₃ CSL upon a temperature increase using atom probe tomography. We find that GeTe-Sb₂Te₃ CSLs already feature significant interdiffusion during the synt

SUBMITTER: Cojocaru-Miredin O 

PROVIDER: S-EPMC11841033 | biostudies-literature | 2025 Feb

REPOSITORIES: biostudies-literature