Piezoresistive Platinum Diselenide Pressure Sensors with Reliable High Sensitivity and Their Integration into Complementary Metal-Oxide-Semiconductor Circuits.

ABSTRACT: Membrane-based sensors are an important market for microelectromechanical systems (MEMS). Two-dimensional (2D) materials, with their low mass, are excellent candidates for suspended membranes to provide high sensitivity, small footprint sensors. The present work demonstrates pressure sensors employing large-scale-synthesized 2D platinum diselenide (PtSe₂) films as piezoresistive membranes supported only by a thin polymer layer. We investigate three different synthesis methods with contrasting growth parameters and establish a reliable high yield fabrication process for suspended PtSe₂/PMMA membranes across sealed cavities. The pressure sensors reproducibly display sensitivities above 6 × 10^-4 kPa^-1. We show that the sensitivity clearly depends on

SUBMITTER: Lukas S 

PROVIDER: S-EPMC11867020 | biostudies-literature | 2025 Feb

REPOSITORIES: biostudies-literature