Without a grain of salt: micropatterning clean MXene thin-film electronics.

ABSTRACT: MXenes exhibit remarkable electrical, mechanical, and thermal properties, positioning them as strong candidates for high-performance electrodes and interconnects. Deposited 2D MXene thin-films suffer from a persistent issue of crystalline salt residues that originate from dissolved intercalation salts used for the exfoliation process during synthesis. These 3D salt by-products can cause issues during further nanofabrication processing and be detrimental to integrated device performance. This study introduces a three-step approach involving spin-coating deposition, HCl spin-cleaning, and lift-off. Rigorous morphological characterization of the patterned MXene was performed, confirming that the spin-cleaning step effectively removed all halide salt residues. Transparent sub-10 nm-thick MXene

SUBMITTER: Favelukis B 

PROVIDER: S-EPMC11878117 | biostudies-literature | 2025 Feb

REPOSITORIES: biostudies-literature