Design of a novel tri-axis ZnO nanowires based piezoelectric accelerometer.

ABSTRACT: Micro-Electromechanical Systems (MEMS) are pivotal in modern technology, serving as components like accelerometers, gyroscopes, and pressure sensors in various applications. MEMS accelerometers are key components used for measuring motion and vibrations in a wide range of systems. This paper presents the proposed design of a ZnO nanowires-based piezoelectric accelerometer. Owing to the ZnO nanowires' unique piezoelectric properties, the accelerometer can measure acceleration in three axes. A mathematical model is derived to analyze the behavior of nanowires under applied acceleration. Finite Element Method (FEM) simulations were carried out to evaluate the performance of the accelerometer. The key parameters of the accelerometer such as mechanical deformation, stress, voltage, and sensitiv

SUBMITTER: Khan MS 

PROVIDER: S-EPMC11882042 | biostudies-literature | 2025

REPOSITORIES: biostudies-literature