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3D Femtosecond Laser Beam Deflection for High-Precision Fabrication and Modulation of Individual Voxelated PCM Meta-Atoms.


ABSTRACT: Optical metasurfaces have found widespread applications in the field of optoelectronic devices. However, achieving dynamic and flexible control over metasurface functionalities, while also developing simplified fabrication methods for metasurfaces, continues to pose a significant challenge. Here, the study introduces a PCM-only metasurface that exclusively consists of voxel units crafted from different phases of phase-change materials. Micro-nano regions, with varying phase states, are directly utilized as resonant elements and embedded in the material, forming the metasurface voxel meta-atoms. By manipulating the morphology, size, and arrangement of these meta-atoms, the study achieves both the fabrication and modulation of the PCM-only metasurface. Additionally, a 3D high-precision voxel

SUBMITTER: Han W 

PROVIDER: S-EPMC11884528 | biostudies-literature | 2025 Mar

REPOSITORIES: biostudies-literature