Reactive co-sputter deposition of Ta-doped tungsten oxide thin films for water splitting application.

ABSTRACT: This study aimed to investigate the structural, optical, and electronic properties of WO₃ thin films modified by Ta-doping, considering their potential application in photoelectrochemical (PEC) water splitting. Due to its unique physical and chemical properties, WO₃ films have been commonly suggested as a promising photoanode for hydrogen production. However, the wide bandgap and unsuitable band edge positions of WO₃ limit its PEC efficiency. Doping have been extensively applied as an effective strategy for bandgap engineering. Here, post-annealed WO₃ films with different concentrations of Ta dopant were synthesized via reactive magnetron co-sputtering, while DC and RF sputtering powers were varied with the aim of achieving the desired properties

SUBMITTER: Jafarpour S 

PROVIDER: S-EPMC11893905 | biostudies-literature | 2025 Mar

REPOSITORIES: biostudies-literature