Micro-3D sculptured metastructures with deep trenches for sub-10 μm resolution.

ABSTRACT: Three-dimensional (3D) printing allows for the construction of complex structures. However, 3D-printing vertical structures with a high aspect ratio remains a pending challenge, especially when a high lateral resolution is required. Here, to address this challenge, we propose and demonstrate micro-3D sculptured metastructures with deep trenches of 1:4 (width:height) aspect ratio for sub-10 µm resolution. Our construction relies on two-photon polymerization for a 3D-pattern with its trenches, followed by electroplating of a thick metal film and its dry etching to remove the seed layer. To test the proposed fabrication process, we built up three-dimensional RF metastructures showcasing the depth effect as the third dimension. Using the numerical solutions, we custom-tailored these metastruct

SUBMITTER: Atak AC 

PROVIDER: S-EPMC11897358 | biostudies-literature | 2025 Mar

REPOSITORIES: biostudies-literature