Three-Dimensional High-Resolution Laser Lithography of CsPbBr₃ Quantum Dots in Photoresist with Sub-100 nm Feature Size.

ABSTRACT: Perovskite quantum dots (PQDs), with their excellent optical properties, have become a leading semiconductor material in the field of optoelectronics. However, to date, it has been a challenge to achieve the three-dimensional high-resolution patterning of perovskite quantum dots. In this paper, an in situ femtosecond laser-direct-writing technology was demonstrated for three-dimensional high-resolution patterned CsPbBr₃ PQDs using a two-photon photoresist nanocomposite doped with the CsPbBr₃ perovskite precursor. By adjusting the laser processing parameters, the minimum line width of the PQDs material was confirmed to be 98.6 nm, achieving a sub-100 nm PQDs nanowire for the first time. In addition, the fluorescence intensity of the laser-processed PQDs can be regulate

SUBMITTER: Cai B 

PROVIDER: S-EPMC11990146 | biostudies-literature | 2025 Mar

REPOSITORIES: biostudies-literature