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Predicting Pulsed-Laser Deposition SrTiO<sub>3</sub> Homoepitaxy Growth Dynamics Using High-Speed Reflection High-Energy Electron Diffraction.


ABSTRACT: Pulsed-laser deposition (PLD) is a powerful technique for growing complex oxides with controlled stoichiometry. To understand growth dynamics therein, it is common to leverage in situ spectroscopies, such as reflection high-energy electron diffraction (RHEED), to monitor surface crystallinity. Most commercial systems rely on video-rate cameras operating at 60-120 Hz that lack sufficient temporal resolution to capture growth dynamics at practical deposition frequencies. Here, a high-speed platform to record in situ dynamics via RHEED at >500 Hz is implemented. An open-source analysis package is designed to fit diffraction spots to 2D Gaussians, allowing single-pulse surface reconstruction kinetics extraction. Using homoepitaxially deposited (001)-oriented SrTiO3 as

SUBMITTER: Guo Y 

PROVIDER: S-EPMC12022940 | biostudies-literature | 2025 Apr

REPOSITORIES: biostudies-literature